Handbook of thin film technology / 
edited by Leon I. Maissel and Reinhard Glang. 
 - New York :  McGraw-Hill,  1970 [reissue 1983]. 
 - various pagings :  ill. ;  23 cm. 
 - McGraw-Hill handbooks .
 - McGraw-Hill handbooks. .
<br/><br/>Includes bibliographical reference and index. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin film devices.
<br/><br/><label>Dewey Class. No.: </label>621.38173  / HAN 1983